We have developed a simple microfluidic device that allows us to model the peak deflection experienced by an elastomer membrane when under a dynamic pneumatic or hydraulic actuation. The device uses fluidic displacement principles to accurately display the volume change experienced by an expanding membrane. This volume change is then used to calculate the peak deflection height of the membrane. The device has been fabricated using already well established dry film techniques commonly used in the field of microfluidics. Its simple design does not require any complex or expensive electronics and experimental results show the device's ability to record deflections over a range of membrane diameters down to a resolution of 38 μm. Simple geometry changes can allow nanoscale resolution measurements. The device represents a low cost method of membrane deflection characterization at the micro and nanoscales.
|Number of pages||4|
|Publication status||Published - 31 Dec 2014|
|Event||Eurosensors 2014, the 28th European Conference on Solid-State Transducers - Brescia, Italy|
Duration: 7 Sep 2014 → 10 Sep 2014
- deflection characterization