Fabrication and performance of high-density, matrix-addressable green and ultraviolet micro-LED arrays

C.W. Jeon, H.W. Choi, M.D. Dawson

Research output: Chapter in Book/Report/Conference proceedingChapter


The main task involved in the development of micro-LED arrays relates to the electrical contacting and interconnection of each individual pixel. Planarization has been a common solution employed to level out uneven topologies. The fabrication and performance of GaN-based micro-light emitting diode (μm-LED) arrays with 64×64 elements, with emission at the wavelengths of 510nm (green) and 370nm (near-UV), are reported. It is clear that each individual pixel is well resolved and there is no significant optical cross-talk. We will report fully on these devices, and also on 128×96 arrays at both wavelengths which are currently in development.
Original languageEnglish
Title of host publicationLEOS 2003: 16th Annual meeting of the IEEE Lasers & Electro-Optics Society
Number of pages1
ISBN (Print)0-7803-7888-1
Publication statusPublished - 28 Oct 2003


  • gallium compounds
  • light emitting diodes
  • LED
  • micro-optics
  • optical arrays
  • optical fabrication
  • visible spectra

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