Intracavity control of solid-state lasers using MEMS micromirrors

Alan Paterson, Ralf Bauer, Caspar Clark, Deepak Uttamchandani, Walter Lubeigt

Research output: Chapter in Book/Report/Conference proceedingConference contribution book


Active control of key laser output beam parameters, such as optical power and transverse intensity profile, of a continuous-wave (CW) Nd:YAG laser is reported. This was achieved by accurately controlling the surface profile of an intracavity MEMS micromirror through active control of its substrate temperature. An output power variation (>20%) and a significant modification of the transverse mode profile could be observed for a temperature variation of 35 °C.

Original languageEnglish
Title of host publicationInternational Conference on Optical MEMS and Nanophotonics
Number of pages2
ISBN (Print)9780992841423
Publication statusPublished - 17 Aug 2014
Event2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, United Kingdom
Duration: 17 Aug 201421 Aug 2014


Conference2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
Country/TerritoryUnited Kingdom


  • micromirrors
  • laser cavity resonators
  • output power variation
  • laser beams

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