Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses

E. Gu; C.W. Jeon; M.D. Dawson

Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses

Research output: Contribution to conference › Paper

Abstract

This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.

Original language	English
Publication status	Unpublished - 2 Jun 2005
Event	European Materials Research Society 2005 Spring Meeting - Strasbourg, France Duration: 31 May 2005 → 3 Jun 2005

Conference

Conference	European Materials Research Society 2005 Spring Meeting
City	Strasbourg, France
Period	31/05/05 → 3/06/05

Keywords

photolithography
ultraviolet LED
LED
micro-lenses

Cite this

@conference{2f9bf01e2a844239b9a41a747e4abcc8,

title = "Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses",

abstract = "This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.",

keywords = "photolithography, ultraviolet LED, LED, micro-lenses",

author = "E. Gu and C.W. Jeon and M.D. Dawson",

year = "2005",

month = jun,

day = "2",

language = "English",

note = "European Materials Research Society 2005 Spring Meeting ; Conference date: 31-05-2005 Through 03-06-2005",

}

TY - CONF

T1 - Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses

AU - Gu, E.

AU - Jeon, C.W.

AU - Dawson, M.D.

PY - 2005/6/2

Y1 - 2005/6/2

N2 - This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.

AB - This paper is about mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses. It was presented at the European materials research society sprint meeting in 2005.

KW - photolithography

KW - ultraviolet LED

KW - LED

KW - micro-lenses

UR - http://www.emrs-strasbourg.com/files/pdf/2005_SPRING/program/Jmini.pdf

M3 - Paper

T2 - European Materials Research Society 2005 Spring Meeting

Y2 - 31 May 2005 through 3 June 2005

ER -

Mask-less photolithography using matrix-addressable micro-pixellated ultraviolet LEDs with integrated micro-lenses

Abstract

Conference

Keywords

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Cite this