Nanofabrication of electrode arrays by electron-beam and nanoimprint lithographies

Mairi E. Sandison, Jonathan M. Cooper

Research output: Contribution to journalArticlepeer-review

97 Citations (Scopus)

Abstract

The fabrication of ordered nanoelectrode arrays using both electron-beam lithography and nanoimprint lithography is described. Arrays of nanoelectrodes with varying individual electrode diameters were produced and characterised electrochemically. Whilst both methods are highly reproducibile, nanoimprint lithography has the potential to produce devices rapidly and at low-cost. To our knowledge, this is the first report where nanoimprint lithography is employed for the production of nanoelectrode arrays for electroanalytical sensors.

Original languageEnglish
Pages (from-to)1020-1025
Number of pages6
JournalLab on a Chip
Volume6
Issue number8
Early online date21 Jun 2006
DOIs
Publication statusPublished - Aug 2006

Keywords

  • electrode arrays
  • nanoimprint lithography
  • electroanalytical sensors

Fingerprint

Dive into the research topics of 'Nanofabrication of electrode arrays by electron-beam and nanoimprint lithographies'. Together they form a unique fingerprint.

Cite this