Nano-patterned crossbar structures were fabricated as test structures for the development of nanoelectronic devices based on functional molecules. The crossbar structures serve as a platform for testing electronic properties of molecules and their interface to metal electrodes. The fabrication of the crossbar structures involved electron-beam lithography of sub-100-nm features aligned to electrodes pre-patterned by LTV lithography and the deposition of and pattern transfer into an intermediate layer. The molecules to be tested were self-assembled as a monolayer on the nanopatterned area. The top electrode structures were subsequently deposited on top of the intermediate layer. The crossbar architecture allows measuring the current-voltage characteristics across the molecules for each crossing point individually.
|Name||International Journal of Nanoscience Series|
|Publisher||World Scientific Publishing Company|
|Conference||1st International Conference on Nanotechnology (Nanotech 2004) |
|Period||13/07/04 → 17/07/04|
- molecular monolayer
- molecular electronics
- fabrication devices