Polymer microlens arrays applicable to AllnGaN ultraviolet micro-light-emitting diodes

C.W. Jeon, E. Gu, C. Liu, J.M. Girkin, M.D. Dawson

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We report on the fabrication of high-optical-quality microlens arrays based on ultraviolet (UV)-curable polymer adhesive. The lenses are suitable, amongst other applications, for high-transmission and projection of the output of UV micropixellated light-emitting diodes. The microlenses were fabricated using a resist-reflow technique with reactive ion etching. An O/sub 2/--CF/sub 4/ etch-gas chemistry, where atomic fluorine eliminates the carbon-related polymer residue at the etch front effectively, resulted in etch rates of 1.4 /spl mu/m per minute for the polymer. Spherical microlenses of root mean square surface roughness 3 nm were obtained.
Original languageEnglish
Pages (from-to)1887-1889
Number of pages2
JournalIEEE Photonics Technology Letters
Issue number9
Publication statusPublished - 2005


  • semiconductors
  • adhesives
  • aluminium compounds
  • gallium compounds
  • indium compounds
  • light emitting diodes microlenses
  • optical arrays
  • optical polymers
  • photonics

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