Abstract
We report on the characteristics of quantum well intermixing in GaInNAs/GaAs structures of differing N content. Rapid thermal annealing combined with SiO2 caps deposited on the surface of the samples is used to disorder 1.3 mum GaInNAs/GaAs multiquantum wells which have been preannealed in-situ to the stage of blueshift saturation. The different effects of two capping layer deposition techniques on the interdiffusion of In-Ga have been compared, particular regarding the role of sputtering processes. The dependence of quantum well intermixing-induced photoluminescence blueshift on N concentration has provided extra information on the intrinsic properties of the GaInNAs/GaAs material system. We found that the blueshift decreases as the N concentration increases. This finding not only rules out the possible mechanism of N-As interdiffusion, but also demonstrates the alloy stability of GaInNAs due to the strong bond between In-N. (C) 2004 American Institute of Physics.
Original language | English |
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Pages (from-to) | 7581-7585 |
Number of pages | 4 |
Journal | Journal of Applied Physics |
Volume | 94 |
Issue number | 12 |
DOIs | |
Publication status | Published - Dec 2003 |
Keywords
- gallium compounds
- gallium arsenide
- III-V semiconductors
- semiconductor quantum wells
- rapid thermal annealing
- photoluminescence
- spectral line shift
- sputtering
- chemical interdiffusion