Selective wet etching of AlInN layers for nitride-based MEMS and photonic device structures

I.M. Watson, C. Xiong, E. Gu, M.D. Dawson, F. Rizzi, K. Bejtka, P.R. Edwards, R.W. Martin

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

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