SOI based electromagnetic MEMS scanners and their applications in laser systems

G. Brown, R. Bauer, W. Lubeigt, D. Uttamchandani

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

2 Citations (Scopus)


MEMS scanners are of interest for their potential as low-cost, low operating power devices for use in various photonic systems. The devices reported here are actuated by the electromagnetic force between a static external magnetic field and a current flowing through an SOI MEMS scanner. These scanners have several modes of operation: their mirrors may be rotated and maintained at a static angle (up to ± 1.4 degrees), scanned rapidly (up to 500 Hz); or may be operated in a resonance mode, at the device's mechanical resonance frequency (∼1.2 kHz) for higher rate scanning. The use of these scanners as a Q-switching element within a Nd:YAG laser cavity has been demonstrated. Pulse durations of 400 ns were obtained with a pulse energy of 58 μJ and a pulse peak power of 145 W. The use of an external magnetic field, generated by compact rare-earth magnets, allows a simple and cost-effective commercial fabrication process to be employed (the multi-user SOI process provided by MEMSCAP Inc) and avoids the requirement to deposit magnetic materials on the MEMS structure.
Original languageEnglish
Title of host publicationMoems and Miniaturized Systems XII
EditorsW. Piyawattanametha, Y.H Park
Place of PublicationBellingham
Publication statusPublished - 12 Jun 2013
EventConference on MOEMS and Miniaturized Systems XII - San Francisco, United States
Duration: 4 Feb 20136 Feb 2013

Publication series

NameProceedings of SPIE
ISSN (Print)0277-786X


ConferenceConference on MOEMS and Miniaturized Systems XII
Country/TerritoryUnited States
CitySan Francisco


  • electromagnetic
  • intra-cavity
  • laser
  • MEMS
  • multi-user
  • Q-switch
  • scanner
  • SOI

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