@inproceedings{c5814ea8d9c644db9669c8ed8cf91fc2,
title = "SOI based electromagnetic MEMS scanners and their applications in laser systems",
abstract = "MEMS scanners are of interest for their potential as low-cost, low operating power devices for use in various photonic systems. The devices reported here are actuated by the electromagnetic force between a static external magnetic field and a current flowing through an SOI MEMS scanner. These scanners have several modes of operation: their mirrors may be rotated and maintained at a static angle (up to ± 1.4 degrees), scanned rapidly (up to 500 Hz); or may be operated in a resonance mode, at the device's mechanical resonance frequency (∼1.2 kHz) for higher rate scanning. The use of these scanners as a Q-switching element within a Nd:YAG laser cavity has been demonstrated. Pulse durations of 400 ns were obtained with a pulse energy of 58 μJ and a pulse peak power of 145 W. The use of an external magnetic field, generated by compact rare-earth magnets, allows a simple and cost-effective commercial fabrication process to be employed (the multi-user SOI process provided by MEMSCAP Inc) and avoids the requirement to deposit magnetic materials on the MEMS structure. ",
keywords = "electromagnetic, intra-cavity, laser, MEMS, multi-user, Q-switch, scanner, SOI",
author = "G. Brown and R. Bauer and W. Lubeigt and D. Uttamchandani",
year = "2013",
month = jun,
day = "12",
doi = "10.1117/12.2004911",
language = "English",
isbn = "9780819493859",
series = "Proceedings of SPIE",
publisher = "SPIE",
editor = "W. Piyawattanametha and Y.H Park",
booktitle = "Moems and Miniaturized Systems XII",
note = "Conference on MOEMS and Miniaturized Systems XII ; Conference date: 04-02-2013 Through 06-02-2013",
}