Strongly enhanced photon collection from diamond defect centers under microfabricated integrated solid immersion lenses

J. P. Hadden, J. P. Harrison, A. C. Stanley-Clarke, L. Marseglia, Y.-L. D. Ho, B. R. Patton, J. L. O’Brien, J. G. Rarity

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The efficiency of photon collection from optically active defect centers in bulk diamond is greatly reduced by refraction at the diamond-air interface. We report on the fabrication and measurement of a geometrical solution to the problem; integrated solid immersion lenses (SILs) etched directly into the surface of diamond. An increase of a factor of 10 was observed in the saturated count-rate from a single negatively charged nitrogen-vacancy (NV−)(NV−) within a 5 μm5 μm diameter SIL compared with NV−NV−’s under a planar surface in the same crystal. Such a system is potentially scalable and easily adaptable to other defect centers in bulk diamond.
Original languageEnglish
Article number241901
Number of pages3
JournalApplied Physics Letters
Publication statusPublished - 13 Dec 2010


  • photon collection
  • diamond
  • defect centers

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