Thermoelectrically controlled varifocal micromirror for near aberration free imaging

Lì Lì, Ran Li, Walter Lubeigt, Deepak G. Uttamchandani

Research output: Chapter in Book/Report/Conference proceedingConference contribution book

1 Citation (Scopus)


A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.
Original languageEnglish
Title of host publication2013 International Conference on Optical MEMS and Nanophotonics (OMN)
Place of PublicationPiscataway, NJ, United States
Number of pages2
ISBN (Print)9781479915125
Publication statusPublished - 1 Dec 2013


  • close-loop-controlled miniature Peltier element
  • Zernike coefficients
  • Si-Au
  • differential thermal expansion
  • silicon-gold bimorph varifocal micromirror

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