Thermoelectrically controlled varifocal micromirror for near aberration free imaging

Lì Lì; Ran Li; Walter Lubeigt; Deepak G. Uttamchandani

doi:10.1109/OMN.2013.6659037

Thermoelectrically controlled varifocal micromirror for near aberration free imaging

Lì Lì, Ran Li, Walter Lubeigt, Deepak G. Uttamchandani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution book

1 Citation (Scopus)

Abstract

A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.

Original language	English
Title of host publication	2013 International Conference on Optical MEMS and Nanophotonics (OMN)
Place of Publication	Piscataway, NJ, United States
Publisher	IEEE
Pages	17-18
Number of pages	2
ISBN (Print)	9781479915125
DOIs	https://doi.org/10.1109/OMN.2013.6659037
Publication status	Published - 1 Dec 2013

Keywords

close-loop-controlled miniature Peltier element
Zernike coefficients
Si-Au
differential thermal expansion
silicon-gold bimorph varifocal micromirror

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10.1109/OMN.2013.6659037

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title = "Thermoelectrically controlled varifocal micromirror for near aberration free imaging",

abstract = "A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented. ",

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AU - Lì, Lì

AU - Li, Ran

AU - Lubeigt, Walter

AU - Uttamchandani, Deepak G.

PY - 2013/12/1

Y1 - 2013/12/1

N2 - A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.

AB - A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.

KW - close-loop-controlled miniature Peltier element

KW - Zernike coefficients

KW - Si-Au

KW - differential thermal expansion

KW - silicon-gold bimorph varifocal micromirror

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DO - 10.1109/OMN.2013.6659037

M3 - Conference contribution book

AN - SCOPUS:84892154255

SN - 9781479915125

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EP - 18

BT - 2013 International Conference on Optical MEMS and Nanophotonics (OMN)

PB - IEEE

CY - Piscataway, NJ, United States

ER -

Thermoelectrically controlled varifocal micromirror for near aberration free imaging

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Keywords

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