We present the design, fabrication, and characterization of cubic (3C) silicon carbide microdisk resonators with high quality factor modes at visible and near-infrared wavelengths (600-950 nm). Whispering gallery modes with quality factors as high as 2300 and corresponding mode volumes V ∼ 2 x (N/n)3 are measured using laser scanning confocal microscopy at room temperature. We obtain excellent correspondence between transverse-magnetic (TM) and transverse-electric (TE) polarized resonances simulated using Finite Difference Time Domain (FDTD) method and those observed in experiment. These structures based on ensembles of optically active impurities in 3C-SiC resonators could play an important role in diverse applications of nonlinear and quantum photonics, including low power optical switching and quantum memories.
- cubic silicon carbide
- whispering gallery modes